Ndakaona chirevo chakadaro kare kare: masayendisiti kubva kuGermany, Japan nedzimwe nyika akapedza makore mashanu uye akashandisa anenge mamiriyoni 10 yuan kugadzira bhora rakagadzirwa ne-high-purity silicon-28 zvinhu. Iri 1kg pure silicon bhora rinoda Ultra-precision machining, kukuya nekupukuta, kuyera chaiko (sphericity, roughness and quality), inogona kunzi ibhora rakatenderedza pasi rose.
Ngatizivise iyo yekupedzisira-chaiyo polishing maitiro.
01 Musiyano pakati pekukuya nekukwenenzvera
Kukuya: Kushandisa abrasive particles akaputirwa kana kudzvinyirirwa pachigayo chekukuya, nzvimbo yacho inopedzwa nekufamba kwakasiyana kwechigadziro chekukuya uye workpiece pasi peimwe dzvinyiriro. Kukuya kunogona kushandiswa kugadzira zvakasiyana-siyana zvesimbi uye zvisiri zvesimbi. Iwo akagadziriswa epamusoro maumbirwo anosanganisira ndege, yemukati nekunze cylindrical uye conical nzvimbo, convex uye concave spherical nzvimbo, shinda, mazino pamusoro uye mamwe maprofile. Iko kurongeka kwekugadzirisa kunogona kusvika IT5 ~ IT1, uye kushata kwepamusoro kunogona kusvika kuRa0.63 ~ 0.01μm.
Polishing: Nzira yekugadzirisa iyo inoderedza kushata kwepamusoro kwechishandiso nemakanika, kemikari kana electrochemical chiito kuti uwane inopenya uye yakatsetseka.
Musiyano mukuru uripo pakati pezviviri izvi ndewekuti kupedzwa kwepamusoro kunowanikwa nekukwenenzverwa kwakakwira kupfuura kuya kwekukuya, uye nzira dzemakemikari kana dzemagetsi dzinogona kushandiswa, uku kukuya kuchingoshandisa nzira dzemuchina chete, uye saizi yezviyo inoputika inoshandiswa yakakora kupfuura iyo inoshandiswa kukwenenzvera. Kureva kuti, particle size yakakura.
02 Ultra-chaiyo yekupenya tekinoroji
Ultra-chaiyo polishing ndiwo mweya wemazuva ano indasitiri yemagetsi
Basa reiyo yekupedzisira-chaiyo yekupolisha tekinoroji muindasitiri yemazuva ano yemagetsi haisi kungobata zvinhu zvakasiyana-siyana, asi zvakare kudzikamisa zvinhu zvakasiyana-siyana, kuitira kuti silicon wafers yemamirimita mashoma sikweya inogona kuumba makumi ezviuru kuVLSI inoumbwa nemamiriyoni emadhora. transistors. Semuenzaniso, komputa yakagadzirwa nevanhu yakachinja kubva pamakumi ematani kuenda kumazana emagiramu nhasi, izvo zvisingakwanisi kuitwa pasina kukwenenzverwa kwakanyanya.
Kutora wafer kugadzira semuenzaniso, polishing inhanho yekupedzisira yehurongwa hwese, chinangwa ndechekuvandudza hurema hudiki hwakasiiwa neyakapfuura maitiro ekugadzirisa wafer kuti uwane iyo yakanyanya kufanana. Mazuva ano optoelectronic information industry level inoda kuwanda uye kwakanyatso kuenderana zvinodiwa zveoptoelectronic substrate zvinhu zvakaita sesafire uye single crystal silicon, iyo yasvika padanho renanometer. Izvi zvinoreva kuti kukwenenzverwa kwakapindawo muyero yekupedzisira-chaiyo ye nanometers.
Iyo yakakosha sei iyo yekupedzisira-chaiyo yekupolisha maitiro mukugadzirwa kwemazuva ano, minda yayo yekushandisa inogona kutsanangura zvakananga dambudziko, kusanganisira yakabatanidzwa yedunhu kugadzira, michina yekurapa, auto parts, digital accessories, precision molds uye aerospace.
Iyo tekinoroji yekupenya yepamusoro inongoitwa nenyika shoma dzakaita seUnited States neJapan
Chinhu chakakosha chemushini wekupukuta ndiyo "grinding disc". Ultra-precision polishing ine zvinenge zvakaomesesa zvinodiwa pakugadzirwa kwezvinhu uye tekinoroji zvinodiwa zvedhishi rekukuya mumushini wekupukuta. Iri rudzi rwesimbi disc yakagadzirwa kubva kune yakakosha zvinhu haifanire kungosangana nenano-level chaiyo ye otomatiki mashandiro, asi zvakare kuve neyakaringana yekupisa yekuwedzera coefficient.
Kana muchina wekupukuta uchimhanya nekumhanya, kana kuwedzera kwemafuta kuchikonzera kupisa kushanduka kweiyo grinding disc, iyo flatness uye parallelism ye substrate haigone kuvimbiswa. Uye rudzi urwu rwekupisa kwekukanganisa kukanganisa kusingabvumirwe kuitika hakusi mashoma mamirimita kana mashoma mamicrons, asi mashoma nanometers.
Parizvino, nzira dzepamusoro dzekupolisha dzepasi rese dzakaita seUnited States neJapan dzinogona kutozadzisa zvinodiwa zvekupolisha zve60-inch substrate mbishi zvinhu (izvo zvakakura-hukuru). Zvichienderana neizvi, ivo vakagona iyo yakakosha tekinoroji ye-ultra-chaiyo yekupukuta maitiro uye vakabata zvakasimba danho iri mumusika wepasi rose. . Muchokwadi, kugona tekinoroji iyi zvakare kunodzora kusimudzira kweindasitiri yekugadzira zvemagetsi kusvika pamwero mukuru.
Takatarisana neyakaomarara tekinoroji blockade, mumunda we-ultra-precision polishing, nyika yangu inogona kungozvitsvagira wega parizvino.
Ndeipi nhanho yeChina yekupedzisira-chaiyo polishing tekinoroji?
Muchokwadi, mumunda we-ultra-precision polishing, China haina budiriro.
Muna 2011, "Cerium Oxide Microsphere Particle Size Standard Material uye Its Preparation Technology" yakagadzirwa neboka raDr. Wang Qi kubva kuNational Center for Nanoscale Sciences yeChinese Academy of Sciences yakakunda mubairo wekutanga weChina Petroleum uye Chemical Industry. Federation's Technology Invention Award, uye inoenderana nanoscale particle size standard materials Yakawana rezenisi renyika rekuyeresa chiridzwa uye renyika rekutanga-kirasi chiyero chechinhu chitupa. Iyo yekupedzisira-chaiyo polishing yekugadzira bvunzo maitiro eiyo itsva cerium oxide zvinhu yakapfuura ekunze zvigadzirwa zvechinyakare mune imwechete yakadonha, ichizadza gaka mundima iyi.
Asi Dr. Wang Qi vakati: “Izvi hazvirevi kuti takwira pamusoro peiyi ndima. Pamaitiro ese, panongove nemvura yekupukuta chete asi hapana ultra-precision polishing muchina. Kunyanya, tiri kungotengesa zvinhu. ”
Muna 2019, timu yekutsvagisa yaMuzvinafundo Yuan Julong weZhejiang University yeTekinoroji yakagadzira iyo semi-yakagadziriswa abrasive kemikari mechanical processing tekinoroji. Iwo akatevedzana emichina yekupukuta akagadzirwa akagadzirwa-zhinji neYuhuan CNC Machine Tool Co., Ltd., uye akaonekwa se iPhone4 uye iPad3 girazi neApple. Mudziyo wega wega wepasirese wekupolisha wepanera nealuminium alloy backplane polishing, michina yekupolisha inodarika chiuru nemazana manomwe inoshandiswa kugadzirwa kwakawanda kweApple's iPhone uye iPad magirazi egirazi.
Iko kunakidza kwe mechanical processing iri mune izvi. Kuti utsvage chikamu chemusika uye purofiti, unofanirwa kuedza nepaunogona napo kuti ubatane nevamwe, uye mutungamiri wetekinoroji anogara achivandudza nekuvandudza, kuve akakwenenzverwa, kugara achikwikwidza uye kubata, uye kusimudzira budiriro huru ye teknolojia yevanhu.
Nguva yekutumira: Mar-08-2023